Deep-Ultraviolet Nonlinear Reflection of Silicon Metasurfaces

Tse Kai Luan^1*, Ming Jyun Tsai¹, Jun Yi Hou¹, Xin Yong Wang¹, Ming Yuan Chou¹, Yu Ti Huang¹, Yi Chen Wang¹, Kentaro Nishida², Shi Wei Chu², Ming Lun Tseng¹

¹Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
²Department of Physics, National Taiwan University, Taipei, Taiwan

* Presenter:Tse Kai Luan, email:0418kevin@gmail.com

We investigate nonlinear reflection in silicon metasurfaces operating within the 200–300 nm regime, where strong interband transitions induce polaritonic responses. Owing to the enhanced local field generated by electric and magnetic dipole resonances, DUV illumination leads to pronounced photothermal nonlinear effects that modulate the reflectance of the metasurfaces. A laser-based optical measurement system is implemented to quantify the temperature-dependent nonlinear reflection. These results demonstrate that DUV silicon metasurfaces offer potential for nonlinear photonics and the relevant applications.

Keywords: deep ultraviolet light, silicon metasurface, nonlinear scattering, photothermal effect, polaritons