Fluorescent Nanodiamond Enables High-Resolution Broadband Beam Profiling from EUV to Soft X-Ray

Ya-Ting Kang^1*, Yu-Hsin Yang², Tzu-Ping Huang³, Yin-Yu Lee³, Yu-Chan Lin⁴, Pei-Jie Wu⁵, Huan-Cheng Chang^4,5, Hsin-Yu Yao¹, Teng-I Yang⁶

¹Department of Physics, National Chung Cheng University, Chiayi, Taiwan
²Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan
³National Synchrotron Radiation Research Center, Hsinchu, Taiwan
⁴Institute of Atomic Molecular Sciences, Academia Sinica, Taipei, Taiwan
⁵Department of Chemistry, National Taiwan Normal University, Taipei, Taiwan
⁶National Center of Instrumentation Research, National Applied Research Laboratories, Hsinchu, Taiwan

* Presenter:Ya-Ting Kang, email:kyt9114@gmail.com

We developed a scintillator-based EUV beam profiler employing a uniform 1 μm-thick fluorescent nanodiamonds thin film. Combined with a simple two-lens imaging system providing 2x magnification, the device achieves ~10 μm spatial resolution, as determined by the ripple feature along the edges of a laser-cut rectangular mask. To verify reliability, we compared the fluorescence pattern captured under the synchrotron radiation with long-term exposure result obtained on a PMMA thin film, confirming minimal distortion of the beam profile. Furthermore, this device can also operate effectively over a broad photon-energy range from 92 eV to 1200eV, serving as a cost-effective and broadband camera imaging platform under high-energy radiation and highlighting its potential for characterization and development of advanced radiation source.

Keywords: Extreme ultraviolet, Soft X-ray, Fluorescent Nanodiamonds